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TAZMO Wafer Transfer Robot For EFEM, Atmospheric TT301A-RA
- Model No: TT301A-RA
Motor type: servo motor - Robot arm type：Single arm, for rectangular coordinate robot 220mm
- Operating axis: R1/R2/T/Z
- Operating environment: Atmospheric
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TAZMO Wafer Transfer Robot For EFEM, Atmospheric
This wafer transfer robot is suitable for EFEM. It works in atmospheric environment. Find us the best solution for cost efficient wafer transfer robot.
Data Sheet
| Wafer Handling Method | 1) V: Vacuum chuck |
| 2) G: Gripper | |
| 3) R: Recess (pocket) | |
| 4) B: Bernoulli | |
| 5) M: Mix (For double-hand) | |
| Hand Type | 1) N: None |
| 2) V: Double reverse (without harmonic gear) standard | |
| 3) U: Reverse (with harmonic gear) high load | |
| 4) W: Double reverse (with harmonic gear) high load | |
| Mapping Sensor | 1) N: No mapping sensor |
| 2) T: Through-beam sensor | |
| 3) R: Reflection-type sensor | |
| Slide Rail | 1) N: None |
| 2) S: Standard (80w motor) | |
| 3) H: High speed (200w motor) | |
| Slide Rails Stroke | N: None |
| A: 505mm | |
| B: 1010mm | |
| C: 1515mm | |
| D: 2020mm | |
| E: 2525mm | |
| F: 600mm | |
| G: 1200mm | |
| H: 1800mm | |
| J: 00mm | |
| K: 800mm | |
| Position of Motor Installation | N: No slide rail |
| R: Install on the right (Standard) | |
| L: Install on the left |
Customization
| Item | Spec |
| Wafer Handling Method | 1) V: Vacuum chuck |
| 2) G: Gripper | |
| 3) R: Recess (pocket) | |
| 4) B: Bernoulli | |
| 5) M: Mix (For double-hand) | |
| Hand Type | 1) N: None |
| 2) V: Double reverse (without harmonic gear) standard | |
| 3) U: Reverse (with harmonic gear) high load | |
| 4) W: Double reverse (with harmonic gear) high load | |
| Mapping Sensor | 1) N: No mapping sensor |
| 2) T: Through-beam sensor | |
| 3) R: Reflection-type sensor | |
| Slide Rail | 1) N: None |
| 2) S: Standard (80w motor) | |
| 3) H: High speed (200w motor) | |
| Slide Rails Stroke | N: None |
| A: 505mm | |
| B: 1010mm | |
| C: 1515mm | |
| D: 2020mm | |
| E: 2525mm | |
| F: 600mm | |
| G: 1200mm | |
| H: 1800mm | |
| J: 00mm | |
| K: 800mm | |
| Position of Motor Installation | N: No slide rail |
| R: Install on the right (Standard) | |
| L: Install on the left |