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TAZMO Wafer Robot NTSR Series, Atmospheric Single Arm
- Model No: NTSR
Motor type: servo motor - Robot arm type：Single arm
- Operating axis: R1/R2/T/Z
- Operating environment: Atmospheric
- suitable for silicon wafer 100-300mm
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TAZMO Wafer Robot NTSR Series, Atmospheric Single Arm
TAZMO wafer robot type NTSR is single arm with stepping motor For atmospheric environment.
Data Sheet
Model Series | NTSR |
Motor type | Stepping motor |
Robot arm type | Single arm |
For wafer size | 100mm – 300mm |
Operating axis | R/T/Z |
Range of motion | R= Arm length 130mm: stroke 250mm(excluding end-effector) Arm length 165mm:stroke 320mm (excluding end-effector) T=340deg Z=300mm |
Repeatability | R=±0.1mm T=±0.05deg Z=±0.1mm |
Wafer handling method | Vacuum chuck Gripper |
Wafer hold check | Vacuum chuck:Vacuum sensor with digital display gripper: Photomicro sensor |
Network protocol | RS232C RS485 |
Utility Power/Power source | Drive power DC24V ±5% 10A 1 line Control power: DC24V ±5% 3.15A 1 line |
Customization
TAZMO semiconductor wafer handling robots can be customized according to client’s configuration request. Please provide such information below when you send us inquires:
| Options: | 1. Through-beam mapping sensor |
| 2. Slide rail(X axis) | |
| 3. Controller change AC servo motor specifications | |
| Robot arm length(L): | 1:165mm |
| 2:130mm | |
| Elevator Stroke(Z) | 1:300mm |
| 2:200mm | |
| Robot mount | 1: Lower mount |
| 2: Upper mount |