TAZMO Wafer Transfer Robot For EFEM, Atmospheric TT301A-RA
| Model Series | TT301A-RA |
| Motor type | Servo motor |
| Robot arm type | Single arm, for rectangular coordinate robot 220mm |
| For wafer size | 100mm – 300mm |
| Operating axis | R/W/T/Z |
| Range of motion | R: Arm length 220mm
T: +185deg Z: 330mm |
| Repeatability | XY: ±0.1 mm
Z: ±0.05 mm |
| Wafer handling method | Vacuum chuck
Gripper Recess(pocket) Bernoulli |
| Wafer hold check | Vacuum chuck: Vacuum sensor with digital display
Gripper:Photomicro sensor Bernoulli:Reflective sensor |
| Network protocol | RS232C ETHERNET |
| Utility Power/Power source | Single-phase AC200V~230V+10% 8A 1 line |
Customization:
| Wafer Handling Method | 1) V: Vacuum chuck |
| 2) G: Gripper | |
| 3) R: Recess (pocket) | |
| 4) B: Bernoulli | |
| 5) M: Mix (For double-hand) | |
| Hand Type | 1) N: None |
| 2) V: Double reverse (without harmonic gear) standard | |
| 3) U: Reverse (with harmonic gear) high load | |
| 4) W: Double reverse (with harmonic gear) high load | |
| Mapping Sensor | 1) N: No mapping sensor |
| 2) T: Through-beam sensor | |
| 3) R: Reflection-type sensor | |
| Slide Rail | 1) N: None |
| 2) S: Standard (80w motor) | |
| 3) H: High speed (200w motor) | |
| Slide Rails Stroke | N: None |
| A: 505mm | |
| B: 1010mm | |
| C: 1515mm | |
| D: 2020mm | |
| E: 2525mm | |
| F: 600mm | |
| G: 1200mm | |
| H: 1800mm | |
| J: 00mm | |
| K: 800mm | |
| Position of Motor Installation | N: No slide rail |
| R: Install on the right (Standard) | |
| L: Install on the left |
