300mm Wafer Handling Robot For Atmospheric TT301A-WA Series
Data Sheet
| Model Series | TT301A-WA |
| Motor type | Servo motor |
| Robot arm type | Double arm for cylindrical coordinate robot 178mm |
| For wafer size | 100mm – 300mm |
| Operating axis | R1/R2/T/Z |
| Range of motion | R: Arm length 178mm
T: +185deg Z: 330mm |
| Repeatability | R: ±0.1 mm
T: ±0.02deg Z: ±0.05 mm |
| Wafer handling method | Vacuum chuck
Gripper Recess(pocket) Bernoulli Mix(double hand) |
| Wafer hold check | Vacuum chuck: Vacuum sensor with digital display
Gripper:Photomicro sensor Bernoulli:Reflective sensor |
| Network protocol | RS232C ETHERNET |
| Utility Power/Power source | Single-phase AC200V~230V+10% 8A 1 line |
