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Industrial Robotic Arm For PLP
- Model No: PLP
Motor type: servo motor - Robot arm type：Single arm
- Operating axis: R/ T/Z
- Operating environment: Atmospheric
- suitable for Square substrate 300-650mmm
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Industrial Robotic Arm For PLP
This industrial robotic arm is single arm with servo motor, developed for PLP, realize high-effective square substrate transfer.
Data Sheet
Model Series | PLP Series |
Motor type | Servo motor |
Robot arm type | Single arm |
Target work/Handling object | Square substrate 300-650mmm |
Operating axis | R/T/Z |
Range of motion | R:Maximum arm reach 760mm (from swivel center) T: ±185deg Z: ±500mm S: 2000mm |
Repeatability | R: ±0.2 mm T: ±0.03 deg Z: ±0.1 mm S: ±0.25 mm |
Wafer handling method | Vacuum chuck Gripper Recess(pocket) |
Wafer hold check | Vacuum chuck: Vacuum sensor with digital display Gripper:Photomicro sensor |
Network protocol | RS232C ETHERNET |
Utility Power/Power source | Single-phase or Three-phase AC200V~230V +10% 5A~30A |
Customization
TAZMO semiconductor wafer handling robots can be customized according to client’s configuration request. Please provide such information below when you send us inquires:
Type | Option | Spec |
Arm type | T | Cylindrical Coordinate Standard Single |
W | Cylindrical Coordinate Standard Double | |
R | Square Coordinate Standard Single | |
Elevator type | S | Standard |
W | Telescopic 2-step Elevation | |
Hand type | N | None |
H | Horizontal changer | |
T | Reverse | |
Arm | 1 | 385mm(R·W) |
2 | 179mm(R·W) | |
4 | 220mm(R·T) | |
6 | 300mm(T) | |
8 | 370mm | |
Elevator | 1 | 500mm(S·W) |
2 | 700mm(W) | |
4 | 300mm(S) | |
Slide rail | 0 | 无/None |
1 | 505mm | |
2 | 1010mm | |
3 | 1515mm | |
4 | 2020mm | |
6 | 600mm | |
8 | 1800mm | |
9 | 880mm | |
I | 2000mm | |
J | 2060mm | |
Work gripping method (hand 1) | G | Gripper |
V | Vacuum chuck | |
N | None | |
R | Recess(without seating sensor) | |
P | Recess(with seating sensor) | |
Work gripping method (hand 2) | N | None |
V | Vacuum chuck | |
G | Gripper | |
R | Recess(without seating sensor) | |
P | Recess(with seating sensor) | |
Mapping sensor | T | Transparent type |
N | None | |
R | Reflective type |