Vacuum Robot – Xwetool

Vacuum Robot – Xwetool https://www.xwetool.com Fri, 26 Sep 2025 03:34:43 +0000 en-US hourly 1 https://wordpress.org/?v=6.9 https://www.xwetool.com/wp-content/uploads/2024/10/cropped-site-identity-32x32.jpg Vacuum Robot – Xwetool https://www.xwetool.com 32 32 High Vacuum Wafer Robot MTP Series For 100-300mm Wafer https://www.xwetool.com/product/high-vacuum-wafer-robot/ Fri, 26 Sep 2025 03:34:37 +0000 https://www.xwetool.com/?post_type=product&p=3276 High Vacuum Wafer Robot MTP Series For 100-300mm Wafer

Data Sheet

Model Series	MTP Series
Robot arm type	Double arm
For wafer size	100mm – 300mm
Range of motion	R1,R2:Arm length 220mm/430mm (maximum arm reach,excluding end-effector) T:360deg (±180deg from Home Pos.) Z: Upper mounting 66mm(+64mm/-2mm from Home Pos.) Lower mounting 104mm (+104mm/-2mm from Home Pos.)
Smallest swing diameter radius	580mm for arm length 220mm(When hand length to wafer center is 370mm)
Repeatability	R1/R2:±0.1mm or less T:±0.05°or less Z:±0.05mm or less
Wafer handling method	Recess(Pocket) Contact us
Network protocol	RS232C command control
Utility Power/Power source	Single-phase AC100V~115V ±10%, 7.5A, 1 line (for 100V ACspec) Single-phaseAC200V~230V±10%,5A, 1 line (for 200V AC spec)

Customization:

Voltage	1:100V 2:200V
The number of arm driving axis	2:2 axes(Single arm, R, T) 3:3 axes(Branch arm, R1, R2,T) 4:3 axes(Single arm, X, Y and R,T) 5:3 axes(Single arm, R, T and P)
Elevator Stroke(Z)	A:24mm C:104mm E:160mm
Robot arm length & Link(L)	B:170mm 2 link C:220mm 2 link D:300mm 2 link

]]> Wafer Robot for Low Vacuum MPL Series 100-300 mm https://www.xwetool.com/product/wafer-robot-for-low-vacuum/ Fri, 26 Sep 2025 02:21:36 +0000 https://www.xwetool.com/?post_type=product&p=3275 Wafer Robot for Low Vacuum MPL Series 100-300 mm

Data Sheet

Model Series	MPL Series
Robot arm type	Single arm
For wafer size	100mm – 300mm
Range of motion	R1/R2:Arm length 220mm /430mm(maximum arm reach,excluding end-effector) T:360deg(±180deg from Home Pos.) Z: Upper mounting 66mm(+64mm/-2mm from Home Pos.) Lower mounting 104mm (+104mm/-2mm from Home Pos.)
Smallest swing diameter radius	580mm for arm length 220mm(When hand length towafer center is 370mm)
Repeatability	R1, R2:±0.1mm or less T:+0.05°or less Z:+0.05mm or less
Wafer handling method	Recess(Pocket) Contact us
Network protocol	RS232C command control
Utility Power/Power source	Single-phase AC100V~115V ±10%, 7.5A, 1 line (for 100V ACspec) Single-phase AC200V~230V+10%,5A, 1 line (for 200V AC spec)

Customization:

Voltage	1:100V 2:200V
The number of arm driving axis	2:2 axes(Single arm, R, T) 3:3 axes(Branch arm, R1, R2,T) 4:3 axes(Single arm, X, Y and R,T) 5:3 axes(Single arm, R, T and P)
Elevator Stroke(Z)	A:200mm C:300mm E:380mm
Robot arm length & Link(L)	A:130mm 2 link B:170mm 2 link C:220mm 2 link D:300mm 2 link

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