TAZMO Semiconductor Wafer Handling Robots MTE Series
Data Sheet
| Model Series | MTE Series |
| Motor type | Servo motor |
| Robot arm type | Single arm |
| For wafer size | 100mm – 450mm |
| Operating axis | R/T/W/Z/P |
| Range of motion | R=590mm(maximum arm reach,excluding end-effector)
T=350deg(±175deg from Home Pos.) W=360deg(±180deg from Home Pos.) Z=300mm P=180deg (Remark: All values are based on MTQ-EC *-EV.) |
| Repeatability | XY: ±0.1 mm
Z: ±0.05 mm P: ±0.02 deg |
| Wafer handling method | Vacuum chuck
Gripper Recess(pocket) Bernoulli |
| Wafer hold check | Vacuum chuck: Vacuum sensor with digital display
Gripper:Photomicro sensor Bernoulli:Reflective sensor |
| Network protocol | RS232C |
| Utility Power/Power source | Single-phase AC100V~115V ±10%, 7A, 1 line(for 100V ACspec)
Single-phaseAC 200V~230V+10%,5A，1line(for 200V AC spec) |
Customizations:
| Robot arm length & Link(L) | B | 190mm 2 link |
| D | 245mm 3 link | |
| C | 220mm 2 link | |
| E | 300mm 3 link | |
| G | 300mm 2 link | |
| Elevator Stroke(Z) | A | 200mm |
| C | 300mm | |
| D | 350mm | |
| Voltage | 1 | 100V |
| 2 | 200V | |
| Hand | E | Changer[Double] |
| T | Reverse | |
| H | Horizontal changer | |
| S | Single | |
| End Effector | G | Gripper |
| R | Recess hand | |
| B | Bernoulli | |
| Z | Custom | |
| N | None | |
| V | Vacuum chuck |
