Wafer Aligner MAF-H 200MM – Edge Hold
Model：MAF-H
Handling object：200mm wafer (notch/flat)；SEMl/JElDA standard wafer.
Alignment time：7.5 seconds or less(15 seconds or less when separatechucking required)
Alignment accuracy：T=±0.2deg
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Wafer Aligner MAF-H 200MM – Edge Hold
Model：MAF-H
Handling object：200mm wafer (notch/flat)；SEMl/JElDA standard wafer.
Alignment time：7.5 seconds or less(15 seconds or less when separatechucking required)
Alignment accuracy：T=±0.2deg
